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Overview

Components

Various shapes of ceramic components are available with advanced technology.

Properties

Aluminum Nitride

  • High purity（～99.9%）
  • High thermal conductivity (~ 170W/mK)
  • High corrosion and plasma resistance

[Products]

Shaft, Susceptor ring

Aluminum oxide

  • High purity (~ 99.9%)
  • High corrosion and plasma resistance
  • Complicated shape
  • Large shape

[Products]

Ring

Featured Products

Ceramic heaters

Using highly heat-conductive AlN, these heaters deliver outstanding temperature consisency through the uniform sintering of resistance-heating elements and significantly reduce metallic contamination and impurities.

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Electrostatic chucks

Electrostatic chucks demonstrate high strength, heat conductivity, and heat and shock resistance. Thanks to our proprietary volume resistivity control technologies, these chucks are compatible with a wide range of temperatures.

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Inquiry about Ceramics for Semiconductor Manufacturing

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